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公司基本資料信息
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高可靠性和精度的流量控制器
快速的響應(yīng)時(shí)間
金屬密封.
壓電控制閥.
316L不銹鋼材質(zhì).
5 ccm-100 slm流量
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Model |
SEC-4400 |
SEC-4500 |
SEC-4550 |
SEC-4600 |
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5 sccm ~ 8 slm |
10 ~ 30 slm |
31 ~ 50 slm |
51 ~ 100 slm |
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Wetted Materials |
M (metal) -Type: SUS-316L-R (viton) type | |||
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Valve Piezo Valve |
(Normal Close or | |||
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2 ~ 100% F.S. | |||
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Accuracy |
± 1% F.S. | |||
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Response |
<1.0sec. (500ms typical) | |||
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Linearity |
± 0.5% F.S. | |||
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Repeatability |
± 0.2% F.S. | |||
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Operating Pressure |
14 ~ 42 psi |
21 ~ 42 psi | ||
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Leak Integrity |
M-Type: 5x10 -10 Pa·m 3/s(He) or less | |||
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Operating Temperature |
5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C) | |||
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Flow Rate Setting Signal |
0.1 ~ 5VDC | |||
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Flow Rate Output Signal |
0 ~ 5VDC | |||
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Power Supply |
± 15VDC ± 5% 60mA | |||
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Standard Fitting |
1/4” VCR, 1/4” Swagelok |
3/8”VCR,3/8”Swagelok | ||
