步進(jìn)電機(jī)從靜止加速到工作轉(zhuǎn)速（一般為每分鐘幾百轉(zhuǎn)）需要200～400毫秒。交流伺服系統(tǒng)的加速性能較好，以山洋400W交流伺服電機(jī)為例，從靜止加速到其額定轉(zhuǎn)速3000RPM僅需幾毫秒，可用于要求快速啟停的控制場(chǎng)合。
0040-77243 - COMPOSITE RETAINING RING 8" TITAN HEAD
0040-77646 - Membrane, internal, 8" Titan Head II
0040-77653 - NYLON BRUSH
0050-75360 - GASLINE MIX BYPASS UPPER
0090-00195 - SW ASSY, WTR FLOW 1/4 NPT SST .5 GPM TRI
0090-20172 - DIGITAL IND ASSEMBLY
0090-77063 - KEY ASSY
0140-00770 - HARNESS ASSY REACTIVE PC W/RGA @C/D INTE
0140-35429 - Harness, Chamber Tray Interconnect
0140-36042 - Harness, Chamber Tray Interconnect
0190-01403 - T/C Assy Heater WXZ
0200-00137 - FOCUS RING, 195MM SNNF 1" 60DEG, DPS
0200-00230 - 8'' Dep.Ring
0200-00673 - COVER RING 8"
0200-01155 - Ring, Deposition, Deeper, Groove, 200mm
0200-01393 - LINER, COMMON, BD/BLOK, LOWK, 200MM PROD
0200-01533 - INSOLATOR, CERAMIC, COMMON BD/BLOK LOWK
0200-01993 - SKIRT,CERAMIC,2?00 MM PC II E FLOATING-PIN
0200-02823 - INSULATOR, CERAMIC, COMMON BD/BLOK LOWK
0200-02866 - RING, SINGLE, LOW PROFILE, 200MM SNNF, D
0200-03385 - PIN, WAFER LIFT, SIC, DPN 200MM
0200-20055 - INSULATOR, 8" W/ ANTENNA PCII, PED
0200-35867 - Applicator Tube, Microwave Clean
0200-76089 - Skirt, Ceramic, PCIIe, Floating
0226-41540 - KIT, GAS LINE, INERT, VERIFLO, 10RA
0240-75660 - KIT, ENDURA BUFFER LID BRACKET
